Research output per year
Research output per year
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2014
Liquid Phase Epitaxy (LPE) formation of localized high quality and mobility Ge & SiGe by high dose ge-implantation with laser melt annealing for 10nm and 7nm node CMOS technology
Borland, J., Sugitani, M., Oesterlin, P., Johnson, W., Buyuklimanli, T., Hengstebeck, R., Kennon, E., Jones, K. & Joshi, A., 2014, In: ECS Transactions. 64, 6, p. 127-145 19 p.Research output: Contribution to journal › Conference article › peer-review
5 Scopus citations