Material Science
Thin Films
100%
Film
68%
Lithography
52%
Oxide Compound
38%
Vanadium
27%
Silicon
25%
Electrical Resistivity
18%
Photovoltaics
14%
Nanowire
13%
Ion Beam Deposition
12%
Magnetron Sputtering
12%
Annealing
10%
Tin
9%
Self Assembly
9%
Polysilane
8%
Plasma-Enhanced Chemical Vapor Deposition
8%
Amorphous Material
8%
Titanium Dioxide
7%
Dielectric Material
7%
Nanocrystalline Material
7%
Optical Property
6%
X-Ray Diffraction
6%
Oxide Film
5%
Solar Cell
5%
Self Assembled Monolayer
5%
Scanning Electron Microscopy
5%
Electronic Circuit
5%
Oxidation Reaction
5%
Keyphrases
Sculptured Thin Films
25%
Vanadium Oxide Thin Film
18%
193nm Lithography
13%
Lithography
13%
Excimer Laser
13%
Chiral Sculptured Thin Film
12%
Laser Lithography
11%
Biased Target Ion Beam Deposition
11%
Photoresist
10%
Annealing
10%
Temperature Coefficient of Resistance
10%
Silylation
10%
Argon
9%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
9%
Band Gap
7%
Contact Lithography
7%
Resist Process
7%
Nanowires
7%
Columnar
7%
Optical Properties
7%
SnO2 Thin Films
6%
Photoresist Layer
6%
Electrical Properties
6%
Bilayer Resist
6%
Vanadium Oxide
6%
Oxides
6%
Post Deposition
6%
Phase Mask
6%
Nanostructures
5%
Microelectronics
5%
Self-assembled Monolayer
5%
Projection System
5%
Photovoltaic Applications
5%
Phase Shift
5%
Dye-sensitized Solar Cells
5%
Electromagnetic Modeling
5%
Si1-xGex
5%
Planarization
5%
UV Illumination
5%
Deposition Methods
5%
Real Time Spectroscopic Ellipsometry
5%
Pulsed DC
5%
Polysilane
5%
Room Temperature
5%
NiTi Alloy
5%
Circular Bragg Phenomenon
5%
Dry Development
5%
DC Sputtering
5%
Field-effect Transistors
5%
Pattern Transfer
5%
Engineering
Thin Films
55%
Lithography
23%
Excimer Laser
13%
Vapor Deposition
12%
Photoresist
10%
Chemical Vapor Deposition
9%
Photovoltaics
8%
Nanoscale
8%
Temperature Coefficient
7%
Magnetron
7%
Bragg Cell
7%
Gate Oxide
6%
Nanometre
6%
Dye-Sensitized Solar Cell
5%
Planarization
5%
Side Wall
5%
CO2 Conversion
5%