Suzanne E. Mohney

Research output

Research output per year 1989 1997 1998 2001 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2017 2020 2025

• 189 Article
• 28 Conference contribution
• 13 Conference article
• 4 Comment/debate
• 11 More
  • 4 Review article
  • 3 Paper
  • 3 Editorial
  • 1 Chapter

Research output per year

Research output per year

Search results

• 1997

  Fabrication of micromechanical devices from polysilicon films with smooth surfaces

  Guckel, H., Sniegowski, J. J., Christenson, T. R., Mohney, S. & Kelly, T. F., Jan 1 1997, Micromechanics and MEMS: Classic and Seminal Papers to 1990. Wiley-IEEE Press, p. 532-537 6 p.

  Research output: Chapter in Book/Report/Conference proceeding › Chapter

  • Smooth Surface 100%
  • Polysilicon Film 100%
  • Film 100%
  • Surface Tension 50%
  • Annealing 33%