Industry/University Cooperative Research Center for Dielectric Studies: PZT Dielectrics for MEMS Applications

EEC-9526808 Dougherty This award is to establish a cooperative/collaborative research program between The Pennsylvania State University Center for Dielectric Studies Industry/University Cooperative Research Center and the University of California at Berkeley Sensor and Actuator Industry/University Cooperative Research Center in the area of lead zirconate titanate dielectrics for microelectromechanical devices. The center at the University of California is working on surface micromachined devices and the design of microsystems and components. The center at The Pennsylvania State University is working on the physics of thin-film dielectric, piezoelectric and ferroelectric materials. In this program the institutions are sharing expertise and facilities with the goal of improving the performance of piezoelectrically-activated microdevices through the implementation of highly active piezoelectric films in microelectromechanical devices.