Keyphrases
Research Instrumentation
100%
System Application
100%
Nanoscale Sensor
100%
Sensor Systems
100%
Microsensor
100%
Penn State University
66%
Nanoscale Science
33%
Novel Sensor
33%
Silicon Etching
33%
Nanoscale Technology
33%
Undergraduate Degree
33%
High Selectivity
33%
Process Module
33%
Graduate Level
33%
High Etch Rate
33%
High-speed Switching
33%
Resonator
33%
Sensor Electronics
33%
Camp Program
33%
Silica
33%
Sensor-actuator Systems
33%
K-12 Students
33%
Electronic System
33%
Chemical Etching
33%
Biomedical Technology
33%
High Performance
33%
Polymer Thin Films
33%
Homeland Security
33%
Oxides
33%
Piezoelectric Thin Film
33%
Laboratory Course
33%
Microfabrication Techniques
33%
Novel Electronics
33%
Biochemical Sensor
33%
Novel Actuator
33%
Nanosystems
33%
Radiofrequency Lesion
33%
National Laboratories
33%
Microfluidics
33%
Application Integration
33%
Collaboration with Industry
33%
Course Curriculum
33%
Xenon Difluoride
33%
Nanotechnology
33%
Nanoscience
33%
Quantum Mechanical Effects
33%
Ceramic Materials
33%
Penn State
33%
Interdisciplinary Research
33%
Academic Departments
33%
Silicon Dioxide
33%
Inductively Coupled Plasma Etching
33%
Etching Process
33%
Engineering
Nanoscale
100%
Sensor System
100%
High Aspect Ratio
100%
Research Group
25%
Nanosystems
25%
Etch Rate
25%
Radio Frequency
25%
Microfabrication Technique
25%
Microsystem
25%
Etching Process
25%
Thin Films
25%
Resonator
25%
Biochemical Sensor
25%
Piezoelectric
25%
Inductively Coupled Plasma
25%
Material Science
Silicon
100%
Thin Films
25%
Silicon Dioxide
25%
Resonator
25%
Actuator
25%
Microfabrication
25%
Ceramic Material
25%
Piezoelectricity
25%
Oxide Compound
25%
Xenon
25%
Plasma Etching
25%