2-D MEMS scanner for handheld multispectral confocal microscopes

Il Woong Jung; Santi Rattanavarin; Pongsak Sarapukdee; Michael J. Mandella; Wibool Piyawattanametha; Daniel Lopez

doi:10.1109/OMEMS.2012.6318891

2-D MEMS scanner for handheld multispectral confocal microscopes

Il Woong Jung, Santi Rattanavarin, Pongsak Sarapukdee, Michael J. Mandella, Wibool Piyawattanametha, Daniel Lopez

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm². The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25°for the inner axis at 75V and ±1.6 for the outer axis at 60V. The device has resonance frequencies of 2.84kHz and 452Hz for the inner and outer axis torsional modes respectively.

Original language	English (US)
Title of host publication	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages	238-239
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2012.6318891
State	Published - 2012
Event	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada Duration: Aug 6 2012 → Aug 9 2012

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Country/Territory	Canada
City	Banff, AB
Period	8/6/12 → 8/9/12

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/OMEMS.2012.6318891

Cite this

Jung, I. W., Rattanavarin, S., Sarapukdee, P., Mandella, M. J., Piyawattanametha, W., & Lopez, D. (2012). 2-D MEMS scanner for handheld multispectral confocal microscopes. In 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 (pp. 238-239). Article 6318891 (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMEMS.2012.6318891

@inproceedings{0e4ea382ad364100ac5ad7d4ae8021a0,

title = "2-D MEMS scanner for handheld multispectral confocal microscopes",

abstract = "We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm2. The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25°for the inner axis at 75V and ±1.6 for the outer axis at 60V. The device has resonance frequencies of 2.84kHz and 452Hz for the inner and outer axis torsional modes respectively.",

author = "Jung, {Il Woong} and Santi Rattanavarin and Pongsak Sarapukdee and Mandella, {Michael J.} and Wibool Piyawattanametha and Daniel Lopez",

year = "2012",

doi = "10.1109/OMEMS.2012.6318891",

language = "English (US)",

isbn = "9781457715112",

series = "International Conference on Optical MEMS and Nanophotonics",

pages = "238--239",

booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",

}

Jung, IW, Rattanavarin, S, Sarapukdee, P, Mandella, MJ, Piyawattanametha, W & Lopez, D 2012, 2-D MEMS scanner for handheld multispectral confocal microscopes. in 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012., 6318891, International Conference on Optical MEMS and Nanophotonics, pp. 238-239, 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012, Banff, AB, Canada, 8/6/12. https://doi.org/10.1109/OMEMS.2012.6318891

2-D MEMS scanner for handheld multispectral confocal microscopes. / Jung, Il Woong; Rattanavarin, Santi; Sarapukdee, Pongsak et al.
2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012. 2012. p. 238-239 6318891 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - 2-D MEMS scanner for handheld multispectral confocal microscopes

AU - Jung, Il Woong

AU - Rattanavarin, Santi

AU - Sarapukdee, Pongsak

AU - Mandella, Michael J.

AU - Piyawattanametha, Wibool

AU - Lopez, Daniel

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N2 - We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm2. The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25°for the inner axis at 75V and ±1.6 for the outer axis at 60V. The device has resonance frequencies of 2.84kHz and 452Hz for the inner and outer axis torsional modes respectively.

AB - We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm2. The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25°for the inner axis at 75V and ±1.6 for the outer axis at 60V. The device has resonance frequencies of 2.84kHz and 452Hz for the inner and outer axis torsional modes respectively.

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M3 - Conference contribution

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SN - 9781457715112

T3 - International Conference on Optical MEMS and Nanophotonics

SP - 238

EP - 239

BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

Y2 - 6 August 2012 through 9 August 2012

ER -

2-D MEMS scanner for handheld multispectral confocal microscopes

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

UN SDGs

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