TY - JOUR
T1 - 6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3
AU - Yu, Fapeng
AU - Zhang, Shujun
AU - Zhao, Xian
AU - Yuan, Duorong
AU - Wang, Qing ming
AU - Shrout, Thomas R.
PY - 2011/2
Y1 - 2011/2
N2 - Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.
AB - Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.
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U2 - 10.1002/pssr.201004505
DO - 10.1002/pssr.201004505
M3 - Letter
AN - SCOPUS:79251555295
SN - 1862-6254
VL - 5
SP - 47
EP - 49
JO - Physica Status Solidi - Rapid Research Letters
JF - Physica Status Solidi - Rapid Research Letters
IS - 2
ER -