6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3

Fapeng Yu; Shujun Zhang; Xian Zhao; Duorong Yuan; Qing ming Wang; Thomas R. Shrout

doi:10.1002/pssr.201004505

6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa₄O(BO₃)₃ and NdCa₄O(BO₃)₃

Fapeng Yu
, Shujun Zhang
, Xian Zhao
, Duorong Yuan
, Qing ming Wang
, Thomas R. Shrout

Materials Research Institute (MRI)

Research output: Contribution to journal › Letter › peer-review

19 Scopus citations

Abstract

Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa₄O(BO₃)₃ (PrCOB) and NdCa₄O(BO₃)₃ (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k₂₆ and the piezoelectric coefficient d₂₆ were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.

Original language	English (US)
Pages (from-to)	47-49
Number of pages	3
Journal	Physica Status Solidi - Rapid Research Letters
Volume	5
Issue number	2
DOIs	https://doi.org/10.1002/pssr.201004505
State	Published - Feb 2011

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics

Access to Document

10.1002/pssr.201004505

Cite this

@article{d5dbe6440dcd4ab1a7a3fa8d6fb288f5,

title = "6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3",

abstract = "Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2\% and 15.8 pC/N for PrCOB, 29.0\% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.",

author = "Fapeng Yu and Shujun Zhang and Xian Zhao and Duorong Yuan and Wang, \{Qing ming\} and Shrout, \{Thomas R.\}",

year = "2011",

month = feb,

doi = "10.1002/pssr.201004505",

language = "English (US)",

volume = "5",

pages = "47--49",

journal = "Physica Status Solidi - Rapid Research Letters",

issn = "1862-6254",

publisher = "Wiley-VCH Verlag",

number = "2",

}

TY - JOUR

T1 - 6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3

AU - Yu, Fapeng

AU - Zhang, Shujun

AU - Zhao, Xian

AU - Yuan, Duorong

AU - Wang, Qing ming

AU - Shrout, Thomas R.

PY - 2011/2

Y1 - 2011/2

N2 - Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.

AB - Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of -140 °C to 200 °C for (YXt)-1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range.

UR - https://www.scopus.com/pages/publications/79251555295

UR - https://www.scopus.com/pages/publications/79251555295#tab=citedBy

U2 - 10.1002/pssr.201004505

DO - 10.1002/pssr.201004505

M3 - Letter

AN - SCOPUS:79251555295

SN - 1862-6254

VL - 5

SP - 47

EP - 49

JO - Physica Status Solidi - Rapid Research Letters

JF - Physica Status Solidi - Rapid Research Letters

IS - 2

ER -

6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa₄O(BO₃)₃ and NdCa₄O(BO₃)₃

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this