A 1.6-mm, Metal Tube Ultrasonic Motor

Serra Cagatay, Burhanettin Koc, Kenji Uchino

Research output: Contribution to journalArticlepeer-review

104 Scopus citations


A miniaturized metal tube ultrasonic motor, the dimensions of which are 1. 6 mm in diameter and 6 mm in length, was developed. Two flattened surfaces with 90-degrees were ground on the outer surface of the stator. Two PZT-based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. The working frequency of the 1. 6-mm motor with 6 mm in length was 130 kHz. A torque of 0.5 mNm was reached at a maximum power of 45 mW with a speed of 45 rad/sec. The maximum efficiency was 16%.

Original languageEnglish (US)
Pages (from-to)782-786
Number of pages5
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number7
StatePublished - Jul 2003

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


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