TY - GEN
T1 - A combined rarefied and continuum flow regime model for physical vapor deposition (PVD) manufacturing processes
AU - Gott, Kevin
AU - Kulkarni, Anil K.
AU - Singh, Jogender
PY - 2010
Y1 - 2010
N2 - Several modifications to physical vapor deposition (PVD) models are proposed to address the deficiencies in current theoretical studies. Simple calculations show that the flow regime of PVD fabrications will most likely vary from a continuum flow to a rarefied flow in the vacuum chamber as the vapor cloud expands toward the substrate. The flow regime for an evaporated ideal gas is calculated and then an improved equation of state is constructed and analyzed that more accurately describes vaporized metals. The result, combined with experimental observations, suggests PVD fabrication is best represented by a multi-regime flow. Then, a CFD analysis is summarized that further validates the multi-regime analysis hypothesis. Finally, a methodology for constructing and implementing the results of a theoretical multi-regime PVD model is presented.
AB - Several modifications to physical vapor deposition (PVD) models are proposed to address the deficiencies in current theoretical studies. Simple calculations show that the flow regime of PVD fabrications will most likely vary from a continuum flow to a rarefied flow in the vacuum chamber as the vapor cloud expands toward the substrate. The flow regime for an evaporated ideal gas is calculated and then an improved equation of state is constructed and analyzed that more accurately describes vaporized metals. The result, combined with experimental observations, suggests PVD fabrication is best represented by a multi-regime flow. Then, a CFD analysis is summarized that further validates the multi-regime analysis hypothesis. Finally, a methodology for constructing and implementing the results of a theoretical multi-regime PVD model is presented.
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U2 - 10.1115/IMECE2009-10796
DO - 10.1115/IMECE2009-10796
M3 - Conference contribution
AN - SCOPUS:77954247567
SN - 9780791843826
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 15
EP - 21
BT - Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Y2 - 13 November 2009 through 19 November 2009
ER -