A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Zhe Ning; James R. Moyne; Taber H. Smith; Duane S. Boning; Enrique Del Castillo; Jinn Yi Yeh; Arnon M. Hurwitz

A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Zhe Ning, James R. Moyne, Taber H. Smith, Duane S. Boning, Enrique Del Castillo, Jinn Yi Yeh, Arnon M. Hurwitz

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

In Chapters 3 through 5 we described a number of R2R control algorithms. This chapter provides a comparative analysis of R2R control algorithms, focusing on their ability to provide robust and stable control in the face of linear and quadriatic drift.

Original language	English (US)
Title of host publication	Run-to-Run Control in Semiconductor Manufacturing
Publisher	CRC Press
Pages	101-114
Number of pages	14
ISBN (Electronic)	9781420040661
ISBN (Print)	0849311780, 9780849311789
State	Published - Jan 1 2000

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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title = "A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry",

abstract = "In Chapters 3 through 5 we described a number of R2R control algorithms. This chapter provides a comparative analysis of R2R control algorithms, focusing on their ability to provide robust and stable control in the face of linear and quadriatic drift.",

author = "Zhe Ning and Moyne, {James R.} and Smith, {Taber H.} and Boning, {Duane S.} and {Del Castillo}, Enrique and Yeh, {Jinn Yi} and Hurwitz, {Arnon M.}",

note = "Publisher Copyright: {\textcopyright} 2001 by CRC Press LLC.",

year = "2000",

month = jan,

day = "1",

language = "English (US)",

isbn = "0849311780",

pages = "101--114",

booktitle = "Run-to-Run Control in Semiconductor Manufacturing",

publisher = "CRC Press",

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T1 - A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

AU - Ning, Zhe

AU - Moyne, James R.

AU - Smith, Taber H.

AU - Boning, Duane S.

AU - Del Castillo, Enrique

AU - Yeh, Jinn Yi

AU - Hurwitz, Arnon M.

PY - 2000/1/1

Y1 - 2000/1/1

N2 - In Chapters 3 through 5 we described a number of R2R control algorithms. This chapter provides a comparative analysis of R2R control algorithms, focusing on their ability to provide robust and stable control in the face of linear and quadriatic drift.

AB - In Chapters 3 through 5 we described a number of R2R control algorithms. This chapter provides a comparative analysis of R2R control algorithms, focusing on their ability to provide robust and stable control in the face of linear and quadriatic drift.

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M3 - Chapter

AN - SCOPUS:85056937854

SN - 0849311780

SN - 9780849311789

SP - 101

EP - 114

BT - Run-to-Run Control in Semiconductor Manufacturing

PB - CRC Press

ER -

A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Abstract

All Science Journal Classification (ASJC) codes

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