@inproceedings{192d4e7f87c24a7fbb4ae5024b96d878,
title = "A comparative study of SiN deposition methods for millimeter-wave AlGaN/GaN HFETs",
author = "Masataka Higashiwaki and Zhen Chen and Yi Pei and Rongming Chu and Stacia Keller and Nobumitsu Hirose and Takashi Mimura and Toshiaki Matsui and Mishra, {Umesh K.}",
year = "2008",
doi = "10.1109/DRC.2008.4800805",
language = "English (US)",
isbn = "9781424419425",
series = "Device Research Conference - Conference Digest, DRC",
pages = "207--208",
booktitle = "66th DRC Device Research Conference Digest, DRC 2008",
note = "66th DRC Device Research Conference Digest, DRC 2008 ; Conference date: 23-06-2008 Through 25-06-2008",
}