Abstract
Epitaxial layers of Hg1-xCdxTe have been grown by metalorganic chemical vapor deposition (MOCVD) with the interdiffused multilayer process using the tellurium precursor diisopropyltelluride. A comparison is made of the structural quality of the films on lattice-matched substrates of (CdZn)Te and Cd(TeSe) using X-ray diffraction techniques. The interdiffused technique using deposition rates in excess of 10 μm/h is not detrimental to the crystal quality, and Hg1-xCdxTe was grown of comparable quality to that of the substrate. The epilayers are free of twinning and have the lowest values of rocking curve widths reported for MOCVD Hg1-xCdxTe. The as-grown films were p-type at 77 K, consistent with an anticipated mercury vacancy concentration of 7 x 1016 cm-3.
Original language | English (US) |
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Pages (from-to) | 785-792 |
Number of pages | 8 |
Journal | Journal of Crystal Growth |
Volume | 102 |
Issue number | 4 |
DOIs | |
State | Published - Jun 1 1990 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry