Abstract
We report a miniature piezoelectric ultrasonic linear motor that is made of four Pb(Zr,Ti)O3 (PZT) piezoelectric ceramic layers for low-voltage work. The 4-layer piezoelectric laminate works in two orthogonal first-bending modes for producing elliptical oscillations, which are then used to drive a contacting slider into continuous linear motion. Experimental results show that the miniature linear motor (size: 4 × 4 × 12 mm, weight: 1.7 g) can generate a large driving force of 0.48 N and a linear motion speed of up to 160 mm/s, using a 40 Vpp/mm voltage drive at its resonance frequency of 64.5 kHz. The maximum efficiency of the linear motor is 30%.
| Original language | English (US) |
|---|---|
| Article number | 6373798 |
| Pages (from-to) | 2752-2757 |
| Number of pages | 6 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 59 |
| Issue number | 12 |
| DOIs | |
| State | Published - 2012 |
All Science Journal Classification (ASJC) codes
- Instrumentation
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering
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