A face-shear mode single crystal ultrasonic motor

Shiyang Li, Wenhua Jiang, Limei Zheng, Wenwu Cao

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36 Scopus citations


We report a face-shear mode ultrasonic motor (USM) made of [011] c poled Zt ± 45° cut 0.24Pb(In1/2Nb 1/2)O3-0.46Pb(Mg1/3Nb2/3)O 3-0.30PbTiO3 single crystal, which takes advantage of the extremely large d36 2368 pC/N. This motor has a maximum no-load linear velocity of 182.5 mm/s and a maximum output force of 1.03 N under the drive of Vp 50 V, f 72 kHz. Compared with the k31 mode USM made of Pb(Zr,Ti)O3 (PZT), our USM has simpler structure, lower driving frequency, much higher electromechanical coupling factor, and twice power density. This USM can be used for low frequency operation as well as cryogenic actuation with a large torque.

Original languageEnglish (US)
Article number183512
JournalApplied Physics Letters
Issue number18
StatePublished - May 6 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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