A flexible vanadium oxide thermistor array for localized temperature field measurements in brain

Myles W. Billard; Hitesh A. Basantani; Mark W. Horn; Bruce J. Gluckman

doi:10.1109/JSEN.2016.2517161

A flexible vanadium oxide thermistor array for localized temperature field measurements in brain

Myles W. Billard, Hitesh A. Basantani, Mark W. Horn, Bruce J. Gluckman

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

A prototype neural probe designed for chronic measurements and recordings of localized temperature field in brain has been fabricated and tested. An array of through-film vanadium oxide thermistors has been deposited onto glass and flexible 20-μm polyimide substrates. High resistivity vanadium oxide was deposited using bias target ion-beam deposition. Functioning sensors were 10 μm × 10 μm × 85-nm thick. Tested samples on glass showed a mean thermistor temperature coefficient of resistance of -4.060 ± 0.004%/°C and nominal resistance R₀ of 1.3 MΩ.

Original language	English (US)
Article number	7378831
Pages (from-to)	2211-2212
Number of pages	2
Journal	IEEE Sensors Journal
Volume	16
Issue number	8
DOIs	https://doi.org/10.1109/JSEN.2016.2517161
State	Published - Apr 15 2016

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

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10.1109/JSEN.2016.2517161

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abstract = "A prototype neural probe designed for chronic measurements and recordings of localized temperature field in brain has been fabricated and tested. An array of through-film vanadium oxide thermistors has been deposited onto glass and flexible 20-μm polyimide substrates. High resistivity vanadium oxide was deposited using bias target ion-beam deposition. Functioning sensors were 10 μm × 10 μm × 85-nm thick. Tested samples on glass showed a mean thermistor temperature coefficient of resistance of -4.060 ± 0.004%/°C and nominal resistance R0 of 1.3 MΩ.",

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A flexible vanadium oxide thermistor array for localized temperature field measurements in brain

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