A free-standing microthermopile infrared detector

T. A.S. Srinivas; P. J. Timans; R. J. Butcher; H. Ahmed

doi:10.1016/0924-4247(92)80020-4

A free-standing microthermopile infrared detector

T. A.S. Srinivas, P. J. Timans, R. J. Butcher, H. Ahmed

Electrical Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

A free-standing microthermopile infrared detector with a responsivity of 2.5 V/W at 10.6 μm wavelength and a time constant of 20 μs is described. This device is a radiation thermopile in which the hot junctions are thermally isolated from the substrate by making them free-standing. The small thermal mass and good thermal isolation of the hot junctions allows them to heat up when radiation is incident on them, while the cold junctions in contact with the substrate remain at the ambient temperature. The microthermopile is fabricated using silicon micromachining technology and consists of 20 copper-constantan thermocouples connected in series. The performance of the device in the 1 - 12 μm wavelength range is also reported.

Original language	English (US)
Pages (from-to)	403-406
Number of pages	4
Journal	Sensors and Actuators: A. Physical
Volume	32
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(92)80020-4
State	Published - Apr 1992

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/0924-4247(92)80020-4

Cite this

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title = "A free-standing microthermopile infrared detector",

abstract = "A free-standing microthermopile infrared detector with a responsivity of 2.5 V/W at 10.6 μm wavelength and a time constant of 20 μs is described. This device is a radiation thermopile in which the hot junctions are thermally isolated from the substrate by making them free-standing. The small thermal mass and good thermal isolation of the hot junctions allows them to heat up when radiation is incident on them, while the cold junctions in contact with the substrate remain at the ambient temperature. The microthermopile is fabricated using silicon micromachining technology and consists of 20 copper-constantan thermocouples connected in series. The performance of the device in the 1 - 12 μm wavelength range is also reported.",

author = "Srinivas, {T. A.S.} and Timans, {P. J.} and Butcher, {R. J.} and H. Ahmed",

note = "Funding Information: T. A. S. Srinivas acknowledgesa Cambridge Nehru Scholarshipa nd P. J. Timans acknowledges a Royal Society University Research Fellowship.",

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language = "English (US)",

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journal = "Sensors and Actuators: A. Physical",

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T1 - A free-standing microthermopile infrared detector

AU - Srinivas, T. A.S.

AU - Timans, P. J.

AU - Butcher, R. J.

AU - Ahmed, H.

N1 - Funding Information: T. A. S. Srinivas acknowledgesa Cambridge Nehru Scholarshipa nd P. J. Timans acknowledges a Royal Society University Research Fellowship.

PY - 1992/4

Y1 - 1992/4

N2 - A free-standing microthermopile infrared detector with a responsivity of 2.5 V/W at 10.6 μm wavelength and a time constant of 20 μs is described. This device is a radiation thermopile in which the hot junctions are thermally isolated from the substrate by making them free-standing. The small thermal mass and good thermal isolation of the hot junctions allows them to heat up when radiation is incident on them, while the cold junctions in contact with the substrate remain at the ambient temperature. The microthermopile is fabricated using silicon micromachining technology and consists of 20 copper-constantan thermocouples connected in series. The performance of the device in the 1 - 12 μm wavelength range is also reported.

AB - A free-standing microthermopile infrared detector with a responsivity of 2.5 V/W at 10.6 μm wavelength and a time constant of 20 μs is described. This device is a radiation thermopile in which the hot junctions are thermally isolated from the substrate by making them free-standing. The small thermal mass and good thermal isolation of the hot junctions allows them to heat up when radiation is incident on them, while the cold junctions in contact with the substrate remain at the ambient temperature. The microthermopile is fabricated using silicon micromachining technology and consists of 20 copper-constantan thermocouples connected in series. The performance of the device in the 1 - 12 μm wavelength range is also reported.

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ER -

A free-standing microthermopile infrared detector

Abstract

All Science Journal Classification (ASJC) codes

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