A high-temperature double-mode piezoelectric ultrasonic linear motor

Xiaotian Li, Jianguo Chen, Zhijiang Chen, Shuxiang Dong

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46 Scopus citations


A miniature piezoelectric ultrasonic linear motor (piezoelectric vibrator sizes: 4.7 × 13.5 × 2 mm 3) has been studied for precise actuation at 200 °C high-temperature. This piezoelectric linear motor was made of (1-x)BiScO 3-xPbTiO 3 piezoelectric ceramic with a high curie temperature (428 °C) and it was operated in first longitudinal and the second bending double-mode. Our experimental results showed that the linear motor moves smoothly at the temperature as high as 200 °C with a driving force of 0.35 N and a speed up to 42 mm/s.

Original languageEnglish (US)
Article number072902
JournalApplied Physics Letters
Issue number7
StatePublished - Aug 13 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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