Abstract
A simple method for the fabrication of sculptured thin films (STFs) of periodic arrays of high-aspect-ratio (20:1) standing nanorods on silicon substrates is described. It is based on oblique evaporation onto periodically arranged arrays of "mini-rod" topography using a rotating sample stage. 1 Recently, it has been shown that these nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for technological applications. 2
Original language | English (US) |
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Pages (from-to) | 3799-3802 |
Number of pages | 4 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 6 |
Issue number | 12 |
DOIs | |
State | Published - Dec 1 2006 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- General Chemistry
- Biomedical Engineering
- General Materials Science
- Condensed Matter Physics