A method for the fabrication of sculptured thin films of periodic arrays of standing nanorods

Hirofumi Tanaka; Mark W. Horn; Paul S. Weiss

doi:10.1166/jnn.2006.616

A method for the fabrication of sculptured thin films of periodic arrays of standing nanorods

Hirofumi Tanaka
, Mark W. Horn
, Paul S. Weiss

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A simple method for the fabrication of sculptured thin films (STFs) of periodic arrays of high-aspect-ratio (20:1) standing nanorods on silicon substrates is described. It is based on oblique evaporation onto periodically arranged arrays of "mini-rod" topography using a rotating sample stage. ¹ Recently, it has been shown that these nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for technological applications. ²

Original language	English (US)
Pages (from-to)	3799-3802
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	6
Issue number	12
DOIs	https://doi.org/10.1166/jnn.2006.616
State	Published - Dec 1 2006

All Science Journal Classification (ASJC) codes

Bioengineering
General Chemistry
Biomedical Engineering
General Materials Science
Condensed Matter Physics

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10.1166/jnn.2006.616

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A method for the fabrication of sculptured thin films of periodic arrays of standing nanorods

Abstract

All Science Journal Classification (ASJC) codes

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