A method to measure the fatigue property of a micro-cantilever beam

Cun Jiang Yu, Jie Ying Tang, Qing An Huang

Research output: Contribution to journalArticlepeer-review


Many results on the fatigue properties of a MEMS structure have been reported, among which the typical approaches were based on and developed from the principles of detecting the flaws and their propagations, such as using a fan shape comb - drivers to yield cyclic compression and tension, and then, to observe the flaw propagation in a Si beam structure. This paper aims at describing the fatigue phenomenon by using the gradually variable parameters i. e. , mean E method, and then, proposing a test structure, through measuring capacitance to describe the fatigue property. This capacitance has a close relation to the displacement induced by the force applied on. The mean Young's modulus E is calculated according to the measured capacitance to reflect the fatigue property of the simple MEMS structure. At the end of this article, this method is verified by ANSYS.

Original languageEnglish (US)
Pages (from-to)2139-2142
Number of pages4
JournalChinese Journal of Sensors and Actuators
Issue number9
StatePublished - Sep 2007

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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