TY - JOUR
T1 - A micromachined quartz resonator array for biosensing applications
AU - Kao, Ping
AU - Doerner, Steffen
AU - Schneider, Thomas
AU - Allara, David
AU - Hauptmann, Peter
AU - Tadigadapa, Srinivas
N1 - Funding Information:
Manuscript received August 11, 2008; revised February 4, 2009. First published April 7, 2009; current version published June 3, 2009. This work was supported in part by the NSF funded PSU Center for Nanoscale Science under Grant MRSEC DMR-0080019. The work of S. Tadigadapa was supported by an Alexander von Humboldt Fellowship. Subject Editor A. J. Ricco.
PY - 2009
Y1 - 2009
N2 - An 8-pixel micromachined quartz crystal resonator array with a fundamental resonance frequency of 66 MHz has been designed, fabricated, and tested. A compact impedance-spectrum-analyzer electronic interface has been developed and combined with the quartz resonator array to form the biosensing system. The sensor array was calibrated using water-glycerol solutions, and the performance was found to be exactly as expected. Measurement of the crosstalk between the sensor pixels showed an isolation of ∼ 30 dB. Selective functionalization of the pixels was achieved through the use of aqueous 3, 3 ′-Dithiobis (sulfosuccinimidylpropionate) (DTSSP) molecules. The adsorption of avidin on DTSSP gave a frequency signal of 60 kHz in comparison to unfunctionalized pixels. The specific adsorption of avidin on functionalized pixels was confirmed through fluorescence microscopy. Comparing the performance of the micromachined quartz crystal microbalance (QCM) with a commercial 5-MHz device, we found that the micromachined QCM has a 4.25 times higher signal-to-noise ratio. Based on the measurement of the noise and using three times the frequency noise as the limit for the detection of avidin molecules, we expect to resolve a minimum of ∼1/960 of a monolayer of avidin corresponding to an aerial mass density resolution of 0.7 ng/cm2.
AB - An 8-pixel micromachined quartz crystal resonator array with a fundamental resonance frequency of 66 MHz has been designed, fabricated, and tested. A compact impedance-spectrum-analyzer electronic interface has been developed and combined with the quartz resonator array to form the biosensing system. The sensor array was calibrated using water-glycerol solutions, and the performance was found to be exactly as expected. Measurement of the crosstalk between the sensor pixels showed an isolation of ∼ 30 dB. Selective functionalization of the pixels was achieved through the use of aqueous 3, 3 ′-Dithiobis (sulfosuccinimidylpropionate) (DTSSP) molecules. The adsorption of avidin on DTSSP gave a frequency signal of 60 kHz in comparison to unfunctionalized pixels. The specific adsorption of avidin on functionalized pixels was confirmed through fluorescence microscopy. Comparing the performance of the micromachined quartz crystal microbalance (QCM) with a commercial 5-MHz device, we found that the micromachined QCM has a 4.25 times higher signal-to-noise ratio. Based on the measurement of the noise and using three times the frequency noise as the limit for the detection of avidin molecules, we expect to resolve a minimum of ∼1/960 of a monolayer of avidin corresponding to an aerial mass density resolution of 0.7 ng/cm2.
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U2 - 10.1109/JMEMS.2009.2015498
DO - 10.1109/JMEMS.2009.2015498
M3 - Article
AN - SCOPUS:67549118466
SN - 1057-7157
VL - 18
SP - 522
EP - 530
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 3
ER -