A miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad; T. K. Tang; J. K. Reynolds; T. W. Kenny; W. J. Kaiser; Thomas B. Gabrielson

doi:10.1016/0924-4247(96)01128-4

A miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad, T. K. Tang, J. K. Reynolds, T. W. Kenny, W. J. Kaiser, Thomas B. Gabrielson

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10^-7 g (Hz)^-1/2 or less between 10 and 200 Hz, and close to 10^-8 g (Hz)^-1/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm³ volume with a mass of 8 g.

Original language	English (US)
Pages (from-to)	227-231
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	53
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(96)01128-4
State	Published - May 1996

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/0924-4247(96)01128-4

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title = "A miniature, high-sensitivity, electron tunneling accelerometer",

abstract = "Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g (Hz)-1/2 or less between 10 and 200 Hz, and close to 10-8 g (Hz)-1/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 g.",

author = "Rockstad, {Howard K.} and Tang, {T. K.} and Reynolds, {J. K.} and Kenny, {T. W.} and Kaiser, {W. J.} and Gabrielson, {Thomas B.}",

note = "Funding Information: The research described in this paper was performed by the Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology, and was jointly sponsored by Naval Air Warfare Center, Ballistic Missile Defense Organization/Innovative Science and Technology Office, and Advanced Research Projects Agency, through an agreement with the National Aeronautics and Space Administration.",

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AU - Tang, T. K.

AU - Reynolds, J. K.

AU - Kenny, T. W.

AU - Kaiser, W. J.

AU - Gabrielson, Thomas B.

N1 - Funding Information: The research described in this paper was performed by the Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology, and was jointly sponsored by Naval Air Warfare Center, Ballistic Missile Defense Organization/Innovative Science and Technology Office, and Advanced Research Projects Agency, through an agreement with the National Aeronautics and Space Administration.

PY - 1996/5

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N2 - Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g (Hz)-1/2 or less between 10 and 200 Hz, and close to 10-8 g (Hz)-1/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 g.

AB - Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g (Hz)-1/2 or less between 10 and 200 Hz, and close to 10-8 g (Hz)-1/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 g.

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A miniature, high-sensitivity, electron tunneling accelerometer

Abstract

All Science Journal Classification (ASJC) codes

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