A miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad, T. K. Tang, J. K. Reynolds, T. W. Kenny, W. J. Kaiser, Thomas B. Gabrielson

Research output: Contribution to journalArticlepeer-review

41 Scopus citations

Abstract

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g (Hz)-1/2 or less between 10 and 200 Hz, and close to 10-8 g (Hz)-1/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 g.

Original languageEnglish (US)
Pages (from-to)227-231
Number of pages5
JournalSensors and Actuators, A: Physical
Volume53
Issue number1-3
DOIs
StatePublished - May 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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