@inproceedings{adcbab1fbfd24330b3343bc2ded457a4,
title = "A novel MEMS nano-tribometer for dynamic testing in-situ in sem and tem",
abstract = "We present the design and fabrication of a microelectro-mechanical (MEMS) tribomcter with normal and lateral force resolutions of 100 and 1 nano-Newton respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.",
author = "Desai, {A. V.} and Haque, {M. A.}",
year = "2004",
language = "English (US)",
isbn = "0791841812",
series = "Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004",
number = "PART B",
pages = "1617--1624",
booktitle = "Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004",
edition = "PART B",
note = "2004 ASME/STLE International Joint Tribology Conference ; Conference date: 24-10-2004 Through 27-10-2004",
}