Abstract
We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.
Original language | English (US) |
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Pages (from-to) | 13-19 |
Number of pages | 7 |
Journal | Tribology Letters |
Volume | 18 |
Issue number | 1 |
DOIs | |
State | Published - Jan 2005 |
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films