A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM

A. V. Desai; M. A. Haque

doi:10.1007/s11249-004-1700-z

A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM

A. V. Desai
, M. A. Haque

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.

Original language	English (US)
Pages (from-to)	13-19
Number of pages	7
Journal	Tribology Letters
Volume	18
Issue number	1
DOIs	https://doi.org/10.1007/s11249-004-1700-z
State	Published - Jan 2005

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1007/s11249-004-1700-z

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abstract = "We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.",

author = "Desai, \{A. V.\} and Haque, \{M. A.\}",

note = "Funding Information: We acknowledge the support from the Materials Research Institute (MRI) at The Penn State University for nanofabrication at the Penn State Nanofabrication facility. This work was performed in part at the Penn State Nanofabrication Facility, a member of the NSF{\textquoteright}s National Nanofabrication Users Network.",

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AU - Desai, A. V.

AU - Haque, M. A.

N1 - Funding Information: We acknowledge the support from the Materials Research Institute (MRI) at The Penn State University for nanofabrication at the Penn State Nanofabrication facility. This work was performed in part at the Penn State Nanofabrication Facility, a member of the NSF’s National Nanofabrication Users Network.

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Y1 - 2005/1

N2 - We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.

AB - We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.

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JO - Tribology Letters

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A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM

Abstract

All Science Journal Classification (ASJC) codes

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