A novel technique to cover microfluidic systems with parylene-C

Jie Zhu; Ziyu Wang; Xiaotun Qiu; Jonathon Oiler; Cunjiang Yu; Gaofeng Wang; Hongyu Yu

doi:10.1109/NEMS.2010.5592209

A novel technique to cover microfluidic systems with parylene-C

Jie Zhu, Ziyu Wang, Xiaotun Qiu, Jonathon Oiler, Cunjiang Yu, Gaofeng Wang, Hongyu Yu

Engineering Science and Mechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.

Original language	English (US)
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	840-843
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2010.5592209
State	Published - 2010
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: Jan 20 2010 → Jan 23 2010

Publication series

Name	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Conference

Conference	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	1/20/10 → 1/23/10

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2010.5592209

Cite this

Zhu, J., Wang, Z., Qiu, X., Oiler, J., Yu, C., Wang, G., & Yu, H. (2010). A novel technique to cover microfluidic systems with parylene-C. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 840-843). Article 5592209 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592209

@inproceedings{af2caff7dac74f279b850e057f10c25b,

title = "A novel technique to cover microfluidic systems with parylene-C",

abstract = "This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.",

author = "Jie Zhu and Ziyu Wang and Xiaotun Qiu and Jonathon Oiler and Cunjiang Yu and Gaofeng Wang and Hongyu Yu",

year = "2010",

doi = "10.1109/NEMS.2010.5592209",

language = "English (US)",

isbn = "9781424465439",

series = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

pages = "840--843",

booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",

}

Zhu, J, Wang, Z, Qiu, X, Oiler, J, Yu, C, Wang, G & Yu, H 2010, A novel technique to cover microfluidic systems with parylene-C. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592209, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp. 840-843, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 1/20/10. https://doi.org/10.1109/NEMS.2010.5592209

A novel technique to cover microfluidic systems with parylene-C. / Zhu, Jie; Wang, Ziyu; Qiu, Xiaotun et al.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 840-843 5592209 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A novel technique to cover microfluidic systems with parylene-C

AU - Zhu, Jie

AU - Wang, Ziyu

AU - Qiu, Xiaotun

AU - Oiler, Jonathon

AU - Yu, Cunjiang

AU - Wang, Gaofeng

AU - Yu, Hongyu

PY - 2010

Y1 - 2010

N2 - This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.

AB - This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.

UR - http://www.scopus.com/inward/record.url?scp=78649253975&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78649253975&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2010.5592209

DO - 10.1109/NEMS.2010.5592209

M3 - Conference contribution

AN - SCOPUS:78649253975

SN - 9781424465439

T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

SP - 840

EP - 843

BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Y2 - 20 January 2010 through 23 January 2010

ER -

Zhu J, Wang Z, Qiu X, Oiler J, Yu C, Wang G et al. A novel technique to cover microfluidic systems with parylene-C. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 840-843. 5592209. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). doi: 10.1109/NEMS.2010.5592209

A novel technique to cover microfluidic systems with parylene-C

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