TY - JOUR
T1 - A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)
AU - Dangi, Ajay
AU - Cheng, Christopher Y.
AU - Agrawal, Sumit
AU - Tiwari, Sudhanshu
AU - Datta, Gaurav Ramesh
AU - Benoit, Robert R.
AU - Pratap, Rudra
AU - Trolier-Mckinstry, Susan
AU - Kothapalli, Sri Rajasekhar
N1 - Publisher Copyright:
© 1986-2012 IEEE.
PY - 2020/4
Y1 - 2020/4
N2 - A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of 60μm diameter and 75μm pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ∼0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs.
AB - A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of 60μm diameter and 75μm pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ∼0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs.
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U2 - 10.1109/TUFFC.2019.2956463
DO - 10.1109/TUFFC.2019.2956463
M3 - Article
C2 - 31794394
AN - SCOPUS:85082634976
SN - 0885-3010
VL - 67
SP - 801
EP - 809
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 4
M1 - 8915732
ER -