Keyphrases
Systems-based
100%
Tensile Test
100%
Bending Testing
100%
Micro-electro-mechanical Systems
100%
Testing Method
50%
High-resolution
25%
Mechanical Properties
25%
High Force
25%
Size Effect
25%
Displacement Resolution
25%
Interface Effect
25%
Industrial Application
25%
High Displacement
25%
Mechanical Testing
25%
Sub-micrometer
25%
Deformation Process
25%
Mechanical Characterization
25%
Polycrystal
25%
Small Length Scale
25%
Specimen Fabrication
25%
Material Testing
25%
Engineering
Nanoscale
100%
Microelectromechanical System
100%
Tensiles
100%
Mechanical Testing
50%
High Resolution
25%
Thin Films
25%
Microscale
25%
Experimental Result
25%
Length Scale
25%
Industrial Applications
25%
Deformation Process
25%
Polycrystal
25%
Material Science
Microelectromechanical System
100%
Mechanical Testing
75%
Aluminum
25%
Thin Films
25%
Polycrystal
25%