A review of MEMS-based miroscale and nanoscale tensile and bending testing

Keyphrases

• Systems-based 100%
• Tensile Test 100%
• Bending Testing 100%
• Micro-electro-mechanical Systems 100%
• Testing Method 50%
• High-resolution 25%
• Mechanical Properties 25%
• High Force 25%
• Size Effect 25%
• Displacement Resolution 25%
• Interface Effect 25%
• Industrial Application 25%
• High Displacement 25%
• Mechanical Testing 25%
• Sub-micrometer 25%
• Deformation Process 25%
• Mechanical Characterization 25%
• Polycrystal 25%
• Small Length Scale 25%
• Specimen Fabrication 25%
• Material Testing 25%

Engineering

• Nanoscale 100%
• Microelectromechanical System 100%
• Tensiles 100%
• Mechanical Testing 50%
• High Resolution 25%
• Thin Films 25%
• Microscale 25%
• Experimental Result 25%
• Length Scale 25%
• Industrial Applications 25%
• Deformation Process 25%
• Polycrystal 25%

Material Science

• Microelectromechanical System 100%
• Mechanical Testing 75%
• Aluminum 25%
• Thin Films 25%
• Polycrystal 25%