A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates

J. A. Nichols; Thomas Nelson Jackson; M. H. Lu; M. Hack

doi:10.1109/DRC.2004.1367782

A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates

J. A. Nichols, Thomas Nelson Jackson, M. H. Lu, M. Hack

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Scopus citations

Abstract

A-Si:H thin film transistors (TFT) phosphorescent organic light emitting diode (OLED) active matrix pixels and pixel array were fabricated on 50μm thick polyimide substrates. 4-inch polymeric substrates were laminated to glass plates using a removal pressure-sensitive silicone gel adhesive to improve thermal coupling, maintain a flat surface, and provide rigid support during processing. A inverted staggered tri-layer a-Si:H process with a maximum process temperature of 250 °C and conservative 15 μm layout rules was used for pixel fabrication. The results show that the backplane fabricated on polyimide and an optical microscope image is complete of a portion of an array before OLED.

Original language	English (US)
Title of host publication	Device Research Conference - Conference Digest, 62nd DRC
Pages	59-60
Number of pages	2
DOIs	https://doi.org/10.1109/DRC.2004.1367782
State	Published - 2004
Event	Device Research Conference - Conference Digest, 62nd DRC - Notre Dame, IN, United States Duration: Jun 21 2004 → Jun 23 2004

Publication series

Name	Device Research Conference - Conference Digest, DRC
ISSN (Print)	1548-3770

Other

Other	Device Research Conference - Conference Digest, 62nd DRC
Country/Territory	United States
City	Notre Dame, IN
Period	6/21/04 → 6/23/04

All Science Journal Classification (ASJC) codes

General Engineering

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10.1109/DRC.2004.1367782

Cite this

@inproceedings{014efac5683c4762847a667c2124e18d,

title = "A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates",

abstract = "A-Si:H thin film transistors (TFT) phosphorescent organic light emitting diode (OLED) active matrix pixels and pixel array were fabricated on 50μm thick polyimide substrates. 4-inch polymeric substrates were laminated to glass plates using a removal pressure-sensitive silicone gel adhesive to improve thermal coupling, maintain a flat surface, and provide rigid support during processing. A inverted staggered tri-layer a-Si:H process with a maximum process temperature of 250 °C and conservative 15 μm layout rules was used for pixel fabrication. The results show that the backplane fabricated on polyimide and an optical microscope image is complete of a portion of an array before OLED.",

author = "Nichols, {J. A.} and Jackson, {Thomas Nelson} and Lu, {M. H.} and M. Hack",

year = "2004",

doi = "10.1109/DRC.2004.1367782",

language = "English (US)",

isbn = "0780382846",

series = "Device Research Conference - Conference Digest, DRC",

pages = "59--60",

booktitle = "Device Research Conference - Conference Digest, 62nd DRC",

note = "Device Research Conference - Conference Digest, 62nd DRC ; Conference date: 21-06-2004 Through 23-06-2004",

}

Nichols, JA, Jackson, TN, Lu, MH & Hack, M 2004, A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates. in Device Research Conference - Conference Digest, 62nd DRC., III.-4, Device Research Conference - Conference Digest, DRC, pp. 59-60, Device Research Conference - Conference Digest, 62nd DRC, Notre Dame, IN, United States, 6/21/04. https://doi.org/10.1109/DRC.2004.1367782

A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates. / Nichols, J. A.; Jackson, Thomas Nelson; Lu, M. H. et al.
Device Research Conference - Conference Digest, 62nd DRC. 2004. p. 59-60 III.-4 (Device Research Conference - Conference Digest, DRC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates

AU - Nichols, J. A.

AU - Jackson, Thomas Nelson

AU - Lu, M. H.

AU - Hack, M.

PY - 2004

Y1 - 2004

N2 - A-Si:H thin film transistors (TFT) phosphorescent organic light emitting diode (OLED) active matrix pixels and pixel array were fabricated on 50μm thick polyimide substrates. 4-inch polymeric substrates were laminated to glass plates using a removal pressure-sensitive silicone gel adhesive to improve thermal coupling, maintain a flat surface, and provide rigid support during processing. A inverted staggered tri-layer a-Si:H process with a maximum process temperature of 250 °C and conservative 15 μm layout rules was used for pixel fabrication. The results show that the backplane fabricated on polyimide and an optical microscope image is complete of a portion of an array before OLED.

AB - A-Si:H thin film transistors (TFT) phosphorescent organic light emitting diode (OLED) active matrix pixels and pixel array were fabricated on 50μm thick polyimide substrates. 4-inch polymeric substrates were laminated to glass plates using a removal pressure-sensitive silicone gel adhesive to improve thermal coupling, maintain a flat surface, and provide rigid support during processing. A inverted staggered tri-layer a-Si:H process with a maximum process temperature of 250 °C and conservative 15 μm layout rules was used for pixel fabrication. The results show that the backplane fabricated on polyimide and an optical microscope image is complete of a portion of an array before OLED.

UR - http://www.scopus.com/inward/record.url?scp=18044380892&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18044380892&partnerID=8YFLogxK

U2 - 10.1109/DRC.2004.1367782

DO - 10.1109/DRC.2004.1367782

M3 - Conference contribution

AN - SCOPUS:18044380892

SN - 0780382846

T3 - Device Research Conference - Conference Digest, DRC

SP - 59

EP - 60

BT - Device Research Conference - Conference Digest, 62nd DRC

T2 - Device Research Conference - Conference Digest, 62nd DRC

Y2 - 21 June 2004 through 23 June 2004

ER -

A-Si:H TFT phosphorescent OLED active matrix pixels fabricated on polymeric substrates

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