Abstract
We report a hollow type piezoelectric micromotor made of a PZT ceramic/metal composite cylinder with sizes of only 3.6 mm in diameter and 3.0 mm in length aiming at medical endoscope application. The hollow piezoelectric stator of the micromotor, acting as a nut, can excite E02-mode traveling wave along its circumferential direction, and a hollow rotor with a fine lens inside, acting as a screw, is driven to produce a spiral motion along its axis direction inside the hollow stator via the traveling wave. The features of the developed micromotors are its hollow, fine structure and submicrometer step resolution, ensuring that the optical path passes in a narrow and limited space and that the optical focal length is tuned precisely inside the endoscope, which is meaningful in medical diagnosis.
Original language | English (US) |
---|---|
Article number | 052902 |
Journal | Applied Physics Letters |
Volume | 108 |
Issue number | 5 |
DOIs | |
State | Published - Feb 1 2016 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)