A study of target heating in low-energy ion-beam processing

S. A. Ringel; X. C. Mu; S. J. Fonash; S. Ashok

doi:10.1116/1.574082

A study of target heating in low-energy ion-beam processing

S. A. Ringel, X. C. Mu, S. J. Fonash, S. Ashok

Research output: Contribution to journal › Comment/debate › peer-review

Original language	English (US)
Pages (from-to)	2385-2388
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	5
DOIs	https://doi.org/10.1116/1.574082
State	Published - Sep 1986

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "A study of target heating in low-energy ion-beam processing",

author = "Ringel, {S. A.} and Mu, {X. C.} and Fonash, {S. J.} and S. Ashok",

year = "1986",

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volume = "4",

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journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

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AU - Ringel, S. A.

AU - Mu, X. C.

AU - Fonash, S. J.

AU - Ashok, S.

PY - 1986/9

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DO - 10.1116/1.574082

M3 - Comment/debate

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SN - 0734-2101

VL - 4

SP - 2385

EP - 2388

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

ER -

A study of target heating in low-energy ion-beam processing

All Science Journal Classification (ASJC) codes

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