A study of the autofluorescence of parylene materials for μtAS applications

Bo Lu, Siyang Zheng, Brandon Quoc Quach, Yu Chong Tai

Research output: Contribution to journalArticlepeer-review

56 Scopus citations


Parylene-C has been widely used as a biocompatible material for microfluidics and micro total analysis system (μTAS) applications in recent decades. However, its autofluorescence can be a major obstacle for parylene-C based devices used in applications requiring sensitive fluorescence detection. In this paper, Parylene-C was compared with other commonly used polymer and plastic materials in μTAS devices for their autofluorescence. We also report here an in-depth study of the behaviors and mechanisms of the autofluorescence of parylene-C, as well as several other commercialized members in the parylene family, including parylene-D, parylene-N and parylene-HT, using epifluorescence microscopy, fluorimeter and infrared spectroscopy. Strong autofluorescence was induced in parylene-C during short-wavelength excitation (i.e. UV excitation). Variation of autofluorescence intensity of parylene-C film was found to be related to both dehydrogenation and photo-oxidation. Moreover, the influence of microfabrication process on parylene-C autofluorescence was also evaluated. Parylene-HT, which exhibits low initial autofluorescence, decreasing autofluorescence behavior under UV excitation and higher UV stability, can be a promising alternative for μTAS applications with fluorescence detection.

Original languageEnglish (US)
Pages (from-to)1826-1834
Number of pages9
JournalLab on a Chip
Issue number14
StatePublished - 2010

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biochemistry
  • General Chemistry
  • Biomedical Engineering


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