A two degrees-of-freedom piezoelectric single-crystal micromotor

Zhijiang Chen; Xiaotian Li; Guoxi Liu; Shuxiang Dong

doi:10.1063/1.4903834

A two degrees-of-freedom piezoelectric single-crystal micromotor

Zhijiang Chen, Xiaotian Li, Guoxi Liu, Shuxiang Dong

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In_1/2Nb_1/2) O₃-Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ (PIN-PMN-PT) single crystal square-bar (dimensions 2 × 2 × 9 mm³) was developed. The PIN-PMN-PT square-bar stator can generate standing wave elliptical motions in two orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider in two orthogonal directions. The relatively large driving forces of 0.25 N and motion speed of 35 mm/s were obtained under a voltage of 80 V_pp at its resonance frequency of 87.5 kHz. The proposed micromotor has potential for applications in micro robots, cell manipulators, and digital cameras as a two-DOF actuator.

Original language	English (US)
Article number	224101
Journal	Journal of Applied Physics
Volume	116
Issue number	22
DOIs	https://doi.org/10.1063/1.4903834
State	Published - Dec 14 2014

All Science Journal Classification (ASJC) codes

General Physics and Astronomy

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10.1063/1.4903834

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title = "A two degrees-of-freedom piezoelectric single-crystal micromotor",

abstract = "A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In1/2Nb1/2) O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystal square-bar (dimensions 2 × 2 × 9 mm3) was developed. The PIN-PMN-PT square-bar stator can generate standing wave elliptical motions in two orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider in two orthogonal directions. The relatively large driving forces of 0.25 N and motion speed of 35 mm/s were obtained under a voltage of 80 Vpp at its resonance frequency of 87.5 kHz. The proposed micromotor has potential for applications in micro robots, cell manipulators, and digital cameras as a two-DOF actuator.",

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AU - Chen, Zhijiang

AU - Li, Xiaotian

AU - Liu, Guoxi

AU - Dong, Shuxiang

PY - 2014/12/14

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A two degrees-of-freedom piezoelectric single-crystal micromotor

Abstract

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