A two-layer linear piezoelectric micromotor

Xiaotian Li; Penghong Ci; Guoxi Liu; Shuxiang Dong

doi:10.1109/TUFFC.2014.006796

A two-layer linear piezoelectric micromotor

Xiaotian Li
, Penghong Ci
, Guoxi Liu
, Shuxiang Dong

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

A first bending (B₁) mode two-layer piezoelectric ultrasonic linear micromotor has been developed for microoptics driving applications. The piezo-vibrator of the micromotor was composed of two small Pb(Zr,Ti)O₃ (PZT-5) plates, with overall dimensions and mass of only 2.0 × 2.0 × 5.0 mm³ and 0.2 g, respectively. The proposed micromotor could operate either in single-phase voltage (standing wave) mode or two-phase voltage (traveling wave) mode to drive a slider via friction force to provide bidirectional linear motion. A large thrust of up to 0.30 N, which corresponds to a high unit volume direct driving force of 15 mN/mm³, and a linear movement velocity of up to 230 mm/s were obtained under an applied voltage of 80 V_pp at the B₁ mode resonance frequency of 174 kHz.

Original language	English (US)
Article number	7055435
Pages (from-to)	405-411
Number of pages	7
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	62
Issue number	3
DOIs	https://doi.org/10.1109/TUFFC.2014.006796
State	Published - Mar 2015

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2014.006796

Cite this

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title = "A two-layer linear piezoelectric micromotor",

abstract = "A first bending (B1) mode two-layer piezoelectric ultrasonic linear micromotor has been developed for microoptics driving applications. The piezo-vibrator of the micromotor was composed of two small Pb(Zr,Ti)O3 (PZT-5) plates, with overall dimensions and mass of only 2.0 × 2.0 × 5.0 mm3 and 0.2 g, respectively. The proposed micromotor could operate either in single-phase voltage (standing wave) mode or two-phase voltage (traveling wave) mode to drive a slider via friction force to provide bidirectional linear motion. A large thrust of up to 0.30 N, which corresponds to a high unit volume direct driving force of 15 mN/mm3, and a linear movement velocity of up to 230 mm/s were obtained under an applied voltage of 80 Vpp at the B1 mode resonance frequency of 174 kHz.",

author = "Xiaotian Li and Penghong Ci and Guoxi Liu and Shuxiang Dong",

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AU - Li, Xiaotian

AU - Ci, Penghong

AU - Liu, Guoxi

AU - Dong, Shuxiang

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AB - A first bending (B1) mode two-layer piezoelectric ultrasonic linear micromotor has been developed for microoptics driving applications. The piezo-vibrator of the micromotor was composed of two small Pb(Zr,Ti)O3 (PZT-5) plates, with overall dimensions and mass of only 2.0 × 2.0 × 5.0 mm3 and 0.2 g, respectively. The proposed micromotor could operate either in single-phase voltage (standing wave) mode or two-phase voltage (traveling wave) mode to drive a slider via friction force to provide bidirectional linear motion. A large thrust of up to 0.30 N, which corresponds to a high unit volume direct driving force of 15 mN/mm3, and a linear movement velocity of up to 230 mm/s were obtained under an applied voltage of 80 Vpp at the B1 mode resonance frequency of 174 kHz.

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A two-layer linear piezoelectric micromotor

Abstract

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