TY - JOUR
T1 - A way to higher resolution
T2 - Spherical-aberration correction in a 200 kV transmission electron microscope
AU - Urban, Knut
AU - Kabius, Bernd
AU - Haider, Max
AU - Rose, Harald
PY - 1999
Y1 - 1999
N2 - A double hexapole corrector system was constructed for compensation of the spherical aberration of the objective lens of a transmission electron microscope. By implementing this system on a commercial 200 kV instrument with a field emission gun, the spherical aberration correction was demonstrated and an improvement of the point resolution from 0.24 to 0.13 nm was realized. Applying the new instrument to structure studies on Si/CoSi2 interfaces it was demonstrated that an outstanding additional advantage of aberration correction is the substantially reduced contrast delocalization in high-resolution images.
AB - A double hexapole corrector system was constructed for compensation of the spherical aberration of the objective lens of a transmission electron microscope. By implementing this system on a commercial 200 kV instrument with a field emission gun, the spherical aberration correction was demonstrated and an improvement of the point resolution from 0.24 to 0.13 nm was realized. Applying the new instrument to structure studies on Si/CoSi2 interfaces it was demonstrated that an outstanding additional advantage of aberration correction is the substantially reduced contrast delocalization in high-resolution images.
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U2 - 10.1093/oxfordjournals.jmicro.a023753
DO - 10.1093/oxfordjournals.jmicro.a023753
M3 - Article
AN - SCOPUS:0033491129
SN - 0022-0744
VL - 48
SP - 821
EP - 826
JO - Journal of Electron Microscopy
JF - Journal of Electron Microscopy
IS - 6
ER -