Acoustic microscopy for evaluating cracks produced by CO2 laser shaping of thin alumina plates

Chiaki Miyasaka, Mustafa Aslan, Bernhard R. Tittmann

Research output: Contribution to journalConference articlepeer-review


The shaping of thin alumina ceramic plates with lasers appears to be an advantageous method for manufacturing. Unfortunately the failure rate is high because of crack initiation during the application of the high power laser. We have begun to address the issue of crack initiation by the use of in-process and post-process analysis. Here we present our results on the evaluation of cracks by optical, scanning laser, scanning electron and scanning acoustic microscopy. We present images of surface and subsurface micro-cracks generated at different power levels of our high power CO2 laser system. The spatial variation of the Rayleigh wave velocity is measured by the V(z) curve technique. These preliminary data suggest that with improvement the V(z) technique may provide residual stress variation with high spatial resolution. The evaluation described should lead to insight into the fracture mechanism and eventually provide guidance for the choice of laser parameters (e.g., power, focus, scanning rate, emitting duration, or the like).

Original languageEnglish (US)
Pages (from-to)216-225
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
EventNondestructive Evaluation of Materials and Composites II - San Antonio, TX, United States
Duration: Mar 31 1998Apr 1 1998

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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