Active-matrix pixelized well detectors on polymeric substrates

Jiunn Ru Huang, Weidong Qian, Hagen Klauk, Thomas N. Jackson, Kevin Black, Philip Deines-Jones, Stanley D. Hunter

Research output: Contribution to conferencePaperpeer-review

3 Scopus citations


There is currently considerable interest in the fabrication of lightweight, large-area information displays, detectors, imaging sensors, and flexible electronic circuits. We have developed a process to fabricate thin-film amorphous silicon (a-Si) based active-matrix pixelized well detectors on polymeric substrates. Thin-film a-Si is inherently lightweight and can be deposited over very large areas. Electronic devices made by a-Si are typically made on rigid substrates such as glass plates, however, glass substrates are heavy, rigid, and fragile. Alternative substrates such as polymeric films are of interest for a variety of applications, including rugged active-matrix flat panel displays, lightweight spacecraft solar arrays, and flexible imaging sensors. Recently, we have demonstrated a-Si photovoltaic cells, a-Si thin-film transistors (TFTs), and integrated a-Si TFT circuits on flexible Kapton polyimide substrates with characteristics similar to devices made on glass substrates. Here we report on a flat-panel detector for X-rays and charged particles generated by gamma rays, which uses an array of microelectromechanical (MEMS) - like detector structures integrated with a-Si TFTs on a polymeric substrate.

Original languageEnglish (US)
Number of pages7
StatePublished - 2000
EventIEEE 2000 National Aerospace and Electronics Conference (NAECON 2000) - Dayton, OH, USA
Duration: Oct 10 2000Oct 12 2000


OtherIEEE 2000 National Aerospace and Electronics Conference (NAECON 2000)
CityDayton, OH, USA

All Science Journal Classification (ASJC) codes

  • General Engineering


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