@article{836fd1f490454fa59b5f6b20027cca17,
title = "Advances in nanolithography using molecular rulers",
author = "Anderson, \{M. E.\} and Tan, \{L. P.\} and H. Tanaka and M. Mihok and H. Lee and Horn, \{M. W.\} and Weiss, \{P. S.\}",
year = "2003",
doi = "10.1116/1.1621662",
language = "English (US)",
volume = "21",
pages = "3116--3119",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}