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Advances in nanolithography using molecular rulers

  • M. E. Anderson
  • , L. P. Tan
  • , H. Tanaka
  • , M. Mihok
  • , H. Lee
  • , M. W. Horn
  • , P. S. Weiss

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)3116-3119
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
StatePublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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