TY - GEN
T1 - Advances in piezoelectrically actuated RF MEMS switches and phase shifters
AU - Polcawich, Ronald G.
AU - Judy, Daniel
AU - Pulskamp, Jeffrey S.
AU - Trolier-McKinstry, Susan
AU - Dubey, Madan
PY - 2007
Y1 - 2007
N2 - This report presents results on recent advances in piezoelectric actuated radio frequency (RT) microelectromechanical system (MEMS) devices including a temperature insensitive RF MEMS series switch and the demonstration of a 2-bit MEMS phase shifter incorporating PZT switches. Using lead zirconate titanate (PZT) thin films, modifications to our earlier designs resulted in a RF MEMS series switch operating at 10 V from -25°C to 100°C with better than 30 dB isolation and insertion loss less than 0.5 dB from DC to 50 GHz. In addition, a 17 GHz, 2-bit reflection phase shifter has been demonstrated with an average insertion loss of 2.96 dB using PZT shunt switches operating at 15 V.
AB - This report presents results on recent advances in piezoelectric actuated radio frequency (RT) microelectromechanical system (MEMS) devices including a temperature insensitive RF MEMS series switch and the demonstration of a 2-bit MEMS phase shifter incorporating PZT switches. Using lead zirconate titanate (PZT) thin films, modifications to our earlier designs resulted in a RF MEMS series switch operating at 10 V from -25°C to 100°C with better than 30 dB isolation and insertion loss less than 0.5 dB from DC to 50 GHz. In addition, a 17 GHz, 2-bit reflection phase shifter has been demonstrated with an average insertion loss of 2.96 dB using PZT shunt switches operating at 15 V.
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U2 - 10.1109/MWSYM.2007.380297
DO - 10.1109/MWSYM.2007.380297
M3 - Conference contribution
AN - SCOPUS:34748821152
SN - 1424406889
SN - 9781424406883
T3 - IEEE MTT-S International Microwave Symposium Digest
SP - 2083
EP - 2086
BT - 2007 IEEE MTT-S International Microwave Symposium Digest
T2 - 2007 IEEE MTT-S International Microwave Symposium, IMS 2007
Y2 - 3 June 2007 through 8 June 2007
ER -