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Advances in piezoelectrically actuated RF MEMS switches and phase shifters
Ronald G. Polcawich
, Daniel Judy
, Jeffrey S. Pulskamp
,
Susan Trolier-McKinstry
, Madan Dubey
Materials Science and Engineering
Materials Research Institute (MRI)
Nanofabrication Laboratory
Research output
:
Chapter in Book/Report/Conference proceeding
›
Conference contribution
46
Scopus citations
Overview
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Weight
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Engineering
Insertion Loss
40%
Lead Zirconate
20%
Microelectromechanical System
100%
Phase Shifters
100%
Piezoelectric
20%
Radio Frequency
20%
Thin Films
20%
Titanate
20%
Keyphrases
Film Modification
33%
Isolation Loss
33%
Reflection-type Phase Shifter
33%
Series Switch
66%
Shunt Switch
33%
System Switching
100%
Physics
Lead Zirconate Titanate
20%
Microelectromechanical System
100%
Piezoelectricity
20%
Thin Films
20%
Zenith Tubes
60%
Earth and Planetary Sciences
Insertion Loss
40%
Lead Zirconate Titanate
20%
Microelectromechanical System
100%
Radio Frequency
20%
Thin Films
20%