Advances on the fabrication of microchannel plate spatial light modulator based on LiNbO3 waveguide array

Shizhou Yin, Rui Yang, Francis T.S. Yu, Yoshihi Suzuki, Kazunori Shinoda

Research output: Contribution to journalConference articlepeer-review


Recently, we report a new type of micro channel plate spatial light modulator (MSLM), in which the bulk LiNbO3 crystal plate is replaced by an electro-optic composite material, namely, single crystal waveguide array. This array is a 2D LiNbO3 single crystal waveguide array, which consists of single crystal waveguides with filling materials among adjacent waveguides. Since the dielectric constant of LiNbO3 single crystal is much higher than that of gap filling materials such as polymer/epoxy, the electric field can mostly be constrained inside the crystal material. In addition, by selecting proper opaque filling material, there are also no optical crosstalks among adjacent waveguides. Thus, this special waveguide array works as a 2D set of optically and electrically isolated light guides. While the sensitivity is unchanged, the spatial resolution can be increased. In this paper, a prototype of such a MSLM is presented. The manufacturing processes of the MSLM is introduced. The evaluation on the performance of the MSLM is also reported. The advantages and limitations of the MSLM are addressed.

Original languageEnglish (US)
Pages (from-to)141-146
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1999
EventProceedings of the 1999 Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications V - Denver, CO, USA
Duration: Jul 18 1999Jul 19 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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