Advancing three-dimensional MEMS by complimentary laser micro manufacturing

Jeremy A. Palmer, John D. Williams, Tom Lemp, Tom M. Lehecka, Francisco Medina, Ryan B. Wicker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations


This paper describes improvements that enable engineers to create three-dimensional MEMS in a variety of materials. It also provides a means for selectively adding three-dimensional, high aspect ratio features to pre-existing PMMA micro molds for subsequent LIGA processing. This complimentary method involves in situ construction of three-dimensional micro molds in a stand-alone configuration or directly adjacent to features formed by X-ray lithography. Three-dimensional micro molds are created by micro stereolithography (MSL). an additive rapid prototyping technology. Alternatively, three-dimensional features may be added by direct femtosecond laser micro machining. Parameters for optimal femtosecond laser micro machining of PMMA at 800 nanometers are presented. The technical discussion also includes strategies for enhancements in the context of material selection and post-process surface finish. This approach may lead to practical, cost-effective 3-D MEMS with the surface finish and throughput advantages of X-ray lithography. Accurate three-dimensional metal inicrostructures are demonstrated. Challenges remain in process planning for micro stereolithography and development of buried features following femtosecond laser micro machining.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2006
EventMicromachining and Microfabrication Process Technology XI - San Jose, CA, United States
Duration: Jan 25 2006Jan 25 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherMicromachining and Microfabrication Process Technology XI
Country/TerritoryUnited States
CitySan Jose, CA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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