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An experimental and theoretical investigation of electrostatically coupled cantilever microbeams
Saad Ilyas
, Karumbaiah N. Chappanda
, Md A. Al Hafiz
, Abdallah Ramini
, Mohammad I. Younis
School of Science, Engineering & Technology (Harrisburg)
Research output
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Contribution to journal
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Article
›
peer-review
22
Scopus citations
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Engineering
Beamforming
25%
Cantilever Beam
25%
Coupled System
25%
Dynamic Behavior
25%
Experimental Investigation
100%
Frequency Shift
25%
Good Agreement
25%
Input Voltage
25%
Primary Resonance
25%
Resonance Frequency
25%
Resonant Frequency
25%
Resonator
100%
Sensing Application
25%
Simulation Result
25%
Sweep Frequency
25%
Theoretical Investigation
100%
Keyphrases
Beam Resonators
66%
Cantilever Microbeam
100%
Coupled Cantilevers
100%
Fixed Electrode
33%
Flexible Cantilever Beam
33%
Pull-in Characteristics
33%
Pull-in Time
33%
Material Science
Capacitor
25%
Resonator
100%
Silicon
25%