An experimental investigation of the theory of electrostatic deflections

J. I. Siddique; Robert Deaton; Eric Sabo; John A. Pelesko

doi:10.1016/j.elstat.2010.10.007

An experimental investigation of the theory of electrostatic deflections

J. I. Siddique, Robert Deaton, Eric Sabo, John A. Pelesko

Penn State York

Research output: Contribution to journal › Review article › peer-review

17 Scopus citations

Abstract

The so-called " pull-in" instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components " pull-in" or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.

Original language	English (US)
Pages (from-to)	1-6
Number of pages	6
Journal	Journal of Electrostatics
Volume	69
Issue number	1
DOIs	https://doi.org/10.1016/j.elstat.2010.10.007
State	Published - Feb 2011

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Biotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.elstat.2010.10.007

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title = "An experimental investigation of the theory of electrostatic deflections",

abstract = "The so-called {"} pull-in{"} instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components {"} pull-in{"} or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.",

author = "Siddique, {J. I.} and Robert Deaton and Eric Sabo and Pelesko, {John A.}",

note = "Funding Information: J.A.P. thanks the National Science Foundation, NSF Award No. 312154. The authors thank Professor Dong Ye for several useful discussions concerning Section 2 . The author J.I.S. would like to extend his thanks to Penn State York for their travel support.",

year = "2011",

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AU - Siddique, J. I.

AU - Deaton, Robert

AU - Sabo, Eric

AU - Pelesko, John A.

N1 - Funding Information: J.A.P. thanks the National Science Foundation, NSF Award No. 312154. The authors thank Professor Dong Ye for several useful discussions concerning Section 2 . The author J.I.S. would like to extend his thanks to Penn State York for their travel support.

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N2 - The so-called " pull-in" instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components " pull-in" or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.

AB - The so-called " pull-in" instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components " pull-in" or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.

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DO - 10.1016/j.elstat.2010.10.007

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EP - 6

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JF - Journal of Electrostatics

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ER -

An experimental investigation of the theory of electrostatic deflections

Abstract

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