Abstract
This paper describes the design, analysis and performance of a flatness inspection instrument to measure workpieces with up to one millimeter departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nanometers on a Ø75 mm workpiece. This paper presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond-turned workpieces.
| Original language | English (US) |
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| Title of host publication | Proceedings of the 21st Annual ASPE Meeting, ASPE 2006 |
| State | Published - 2006 |
| Event | 21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 - Monterey, CA, United States Duration: Oct 15 2006 → Oct 20 2006 |
Other
| Other | 21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 |
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| Country/Territory | United States |
| City | Monterey, CA |
| Period | 10/15/06 → 10/20/06 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering