Analysis and performance of a parallel axis flatness measuring instrument

Eric Marsh, David Schalcosky, Jeremiah Couey, Ryan Vallance

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


This article describes the design, analysis, and performance of a flatness inspection instrument to measure workpieces with up to 1 mm departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance probe over the spinning surface. Capacitance probes offer user-selectable sensitivity to provide multiple combinations of measurement range and resolution. In tests with a high sensitivity probe, the instrument demonstrated measurement repeatability of 25 nm on a ø75 mm workpiece. This article presents a complete homogeneous transformation matrix analysis of the propagation of errors into the measurement as well as sample measurements on diamond turned workpieces.

Original languageEnglish (US)
Article number025105
JournalReview of Scientific Instruments
Issue number2
StatePublished - 2006

All Science Journal Classification (ASJC) codes

  • Instrumentation


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