Keyphrases
A-Si
100%
Real Time Spectroscopic Ellipsometry
100%
Microcrystalline
40%
In Situ
20%
Depth Profile
20%
Band Gap
20%
Hydrogen Plasma
20%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
20%
Amorphous Silicon
20%
Post Deposition
20%
Two-layer
20%
Solar Cell
20%
Multilayer Stack
20%
Structural Evolution
20%
Alternating Layers
20%
Multi-step Process
20%
Virtual Interface
20%
Compositional Evolution
20%
Low Dilution
20%
Interface Analysis
20%
Multicrystalline Silicon
20%
Underlying Layer
20%
C-Si
20%
Layer Materials
20%
Silicon-germanium Alloy
20%
Bulk Amorphous Materials
20%
H Content
20%
Compositionally Graded
20%
Material Science
Film
100%
Thin Films
100%
Dilution
100%
Silicon
33%
Plasma-Enhanced Chemical Vapor Deposition
33%
Amorphous Silicon
33%
Solar Cell
33%
Silicon Alloys
33%
Si-Ge Alloys
33%
Microcrystalline Silicon
33%
Surface Modification
33%
Surface Etching
33%