Annealing-insensitive "black silicon" with high infrared absorption

Yan Peng, Xiangqian Chen, Yunyan Zhou, Gongjie Xu, Bin Cai, Yiming Zhu, Jian Xu, Ron Henderson, Jianming Dai

Research output: Contribution to journalArticlepeer-review

23 Scopus citations


A black silicon structure with high-aspect-ratio surface spikes was designed and fabricated in vacuum, resulting in absorptance >90% over the range of 200-2500 nm. It is demonstrated that annealing, an essential step in the fabrication of semiconductor devices, has almost no effect on the infrared absorption of this material, while the infrared absorption of an identical structure fabricated in a SF6 drops dramatically after the annealing process. The characteristic of high infrared absorption and annealing- insensitivity is attributed to both the high-aspect-ratio structure and the phosphor-doped low impedance silicon. These results are important for the fabrication of highly efficient optoelectronic devices.

Original languageEnglish (US)
Article number073102
JournalJournal of Applied Physics
Issue number7
StatePublished - Aug 21 2014

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


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