Annealing of multivacancy defects in 4H-SiC

W. E. Carlos, N. Y. Garces, E. R. Glaser, M. A. Fanton

Research output: Contribution to journalArticlepeer-review

55 Scopus citations


The annealing behavior of defects observed in electron paramagnetic resonance (EPR) and photoluminescence (PL) is discussed. We consider the divacancy (the P6/P7 EPR centers) and a previously unreported EPR center that we suggest is a VC - VSi - VC trivacancy and their relationship with each other and with the UD1-3 series of PL lines near 1 eV. We observe that the divacancy and the UD2 PL lines annealing behavior is strongly correlated further establishing the relationship between the EPR and PL centers. We present a detailed discussion of this center and its Si29 and C13 hyperfine spectra which supports our assignment as a trivacancy. The intensity of this center increases with annealing temperature as the divacancy decreases and there is a sample-to-sample correspondence between the overall intensities of the two centers. However, the details of their annealing suggest a more complex relationship than a simple one-to-one transformation. In addition, while the UD1 PL increases with annealing temperature, sample-to-sample variations indicate it is not related to this EPR center.

Original languageEnglish (US)
Article number235201
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number23
StatePublished - 2006

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


Dive into the research topics of 'Annealing of multivacancy defects in 4H-SiC'. Together they form a unique fingerprint.

Cite this